ECSEL JU project SENATE is pioneering photolithography for 7nm chips


Cutting-edge photolithography technology developed by the project has enabled the launch of a new generation of high-performance smartphones featuring powerful and efficient 7nm-node mobile processors.

SENATE, part of a chain of thematically connected initiatives to advance processor fabrication solutions under the ECSEL JU, supported the production of the first commercial 7nm-node chips using extreme ultraviolet (EUV) lithography tools. The processors already feature in several smartphones which were launched on the market last year.

‘A very important milestone for the EUV programme last year were the multiple announcements of consumer products which referenced EUV lithography technology applications,’ says project coordinator Frans List at Netherlands-headquartered ASML, the world’s largest supplier of photolithography systems for the electronics industry.

Read the project's success story here